RF MEMS electrostatically actuated tunable capacitors and their ...
This paper reviews the recent developments of micro-electromechanical system (MEMS) based electrostatically actuated tunable capacitors. MEMS based tunable capacitors (MBTCs) are important building blocks in advanced radio frequency communication systems and portable electronics.
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RF MEMS electrostatically actuated tunable capacitors and their ...
Since inception, microelectromechanical systems (MEMS) have shown great potential to replace RF solid-state devices with superior RF MEMS devices. MEMS based tunable capacitors (MBTCs) exhibit much higher Q factor, and tunability as compared to semiconductor diodes tunable capacitors.
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Tuneable RF MEMS capacitors based on electrostatically
The paper presents the design, modelling, fabrication and testing of a new electromechanical structure for a tuneable RF MEMS capacitor based on an in-plane torsion generated by the in-plane forces developing during polarization of a parallel …
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High-Power High-Reliability High-Q Switched RF MEMS Capacitors
This paper presents an RF MEMS switched-capacitor suitable for tunable filters and …
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Mems capacitor | PPT
MEMS Capacitor • MEMS (Microelectromechanical system) • Can be a variable capacitor by changing the distance between electrodes. • Use in sensing applications as well as in RF electronics. • Use in sensing applications as well as in RF electronics.
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CMOS integrated digital RF MEMS capacitors
A zero-level packaged, digitally switched, RF MEMS capacitor array has been developed within a mass production capable HV RF CMOS process. These RF MEMS capacitors are grouped in flip-chip cells that exhibit a high quality factor of 87 at 2 GHz, a tuning ratio of almost 10 to 1, a self resonant frequency greater than 5 GHz, and operate using a ...
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RF MEMS in Wireless Architectures
RF MEMS switches capable of switching over 100 billion cycles. This is more than enough for the vast majority of commercial and military applications, and now clears a path for greater acceptance of these devices into mainstream wireless markets. 2.2 Medium-Q Tunable Capacitors Tunable μmechanical capacitors, summarized in row 2 of Table 1,
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Design analysis and simulation of a digital RF MEMS varactor
This work presents a variable RF MEMS capacitor based on five cantilever shunt switches for the first time. Conceptually, the proposed varactor design comprises five identical cantilever shunt switches, which allow the creation of 32 discrete capacitance values ranging from 0.091 to 6.04 pF. The latter translates to a tuning range of around 67. The overall …
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The Design, Simulation, and Parametric Optimization of an RF MEMS ...
This study presents the design and simulation of an RF MEMS variable capacitor with a high tuning ratio and high linearity factor of capacitance–voltage response. An electrostatic torsion actuator with planar and non-planar structures is presented to obtain the high tuning ratio by avoiding the occurrence of pull-in point. In the proposed design, the capacitor …
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Tuneable RF MEMS capacitors based on electrostatically
The paper presents the design, modelling, fabrication and testing of a new electromechanical structure for a tuneable RF MEMS capacitor based on an in-plane torsion generated by the in-plane forces developing during polarization of a parallel plate capacitor with partially overlapping electrodes.
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High Q zero level packaged RF-MEMS switched capacitor arrays
This paper presents the design, the realization and the measurement of a thin-film packaged RF-MEMS switched capacitors. Packaging is included in microelectronics fabrication process, with Silicon Nitride thin film. The capacitors are actuated by deflecting thin gold metal membrane towards the package dielectric, increasing the capacitance by a ...
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RF MEMS electrostatically actuated tunable capacitors …
Since inception, microelectromechanical systems (MEMS) have shown great potential to replace RF solid-state devices with superior RF MEMS devices. MEMS based tunable capacitors (MBTCs) exhibit much higher Q …
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Design and characterization of compact digital RF MEMS capacitors …
the RF MEMS capacitor loading line and the coupled actuation capacitor together, thus eliminating the need for resistive or inductive biasing. Figure 10. The effective lumped element circuit model of the 4-bit capacitor; (a) when are beams are up, the OFF state and (b) when all beams are collapsed, on the ON state. Figure 11. The HFSS simulated capacitance for all the …
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Design and simulation of a wide-range variable MEMS capacitor …
Fang D-M, Fu S, Cao Y, Zhou Y, Zhao X-L (2007) Surface micromachined RF MEMS variable capacitor. Microelectron J 38:855–859. Article Google Scholar Feng Z, Zhang W, Su B, Harsh KF, Gupta K, Bright V et al (1999) Design and modeling of RF MEMS tunable capacitors using electro-thermal actuators. In: 1999 IEEE MTT-S International Microwave ...
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Step‐controllable RF MEMS tunable capacitor with ultra‐wide …
Conclusion: The proposed RF MEMS tunable capacitor with a netted metal membrane structure was newly designed, fabricated, and charac-terised to explore the possibilities of being available for reconfigurable RF FEMs and tunable filters. The metal membrane has several slits to divide effective areas and make different spring constants to operate the fabricated capacitor is …
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High Q zero level packaged RF-MEMS switched capacitor arrays
This paper presents the design, the realization and the measurement of a thin-film packaged …
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High Q Zero Level Packaged RF-MEMS Switched Capacitor Arrays
Level Packaged RF-MEMS Switched Capacitor Arrays. 11th European Microwave Integrated Circuits Conference (EuMIC 2016), Oct 2016, Londres, United Kingdom. 10.1109/EuMIC.2016.7777588. hal-01514626 High Q Zero Level Packaged RF-MEMS Switched Capacitor Arrays Kevin Nadaud, Fabien Roubeau, Arnaud Pothier and Pierre Blondy …
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High Q Zero Level Packaged RF-MEMS Switched Capacitor Arrays
Single RF MEMS devices can be combined into pseudo digital arrays of switched capacitors, with combinations result- ing in well-defined step variations with high linearity and low loss. Other technologies, like series combination of stacked gate MOS transistors switches with fixed capacitors can be used for the same purpose.
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Radio-frequency microelectromechanical system
RF MEMS switches, switched capacitors and varactors are classified by actuation method (electrostatic, electrothermal, magnetostatic, piezoelectric), by axis of deflection (lateral, vertical), by circuit configuration (series, shunt), by clamp configuration (cantilever, fixed-fixed beam), or by contact interface (capacitive, ohmic).
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High-Power High-Reliability High-Q Switched RF MEMS Capacitors
This paper presents an RF MEMS switched-capacitor suitable for tunable filters and reconfigurable matching networks. The switched-capacitor results in a capacitance ratio of 1.5-2 depending on the design, and a very high-Q (> 225) at X to Ku-band frequencies.
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Tuneable RF MEMS capacitors based on electrostatically
The paper presents the design, modelling, fabrication and testing of a new electromechanical structure for a tuneable RF MEMS capacitor based on an in-plane torsion generated by the in-plane forces developing during polarization of a parallel plate capacitor with partially overlapping electrodes. The designs explore the possibility to exploit an in plane …
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A Tunable Capacitor Based on MEMS Technology for RF …
In this paper we present a new low actuation voltage and four-support beam for tunable MEMS capacitors which are studied using FEM software e.g. COMSOL and ANSOFT HFSS. The paper includes two main sections. First section explains the design and analytical considerations, and the second section covers the computer simulation results. II.
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One-Chip Integration of RF MEMS Switched Capacitor and Power …
This study presents a single-chip integrated reconfigurable 180-nm complementary metal–oxide–semiconductor (CMOS) power amplifier (PA) with a radio frequency micro-electro-mechanical system (RF MEMS) switched capacitor, which is highly useful for advanced wireless mobile communication systems. The proposed reconfigurable PA prototype …
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